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Proceedings Paper

Development of optical MEMS CO2 sensors
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Paper Abstract

Inexpensive optical MEMS gas and chemical sensors offer chip-level solutions to environmental monitoring, industrial health and safety, indoor air quality, and automobile exhaust emissions monitoring. Previously, Ion Optics, Inc. reported on a new design concept exploiting Si-based suspended micro-bridge structures. The devices are fabricated using conventional CMOS compatible processes. The use of photonic bandgap (PBG) crystals enables narrow band IR emission for high chemical selectivity and sensitivity. Spectral tuning was accomplished by controlling symmetry and lattice spacing of the PBG structures. IR spectroscopic studies were used to characterize transmission, absorption and emission spectra in the 2 to 20 micrometers wavelength range. Prototype designs explored suspension architectures and filament geometries. Device characterization studies measured drive and emission power, temperature uniformity, and black body detectivity. Gas detection was achieved using non-dispersive infrared (NDIR) spectroscopic techniques, whereby target gas species were determined from comparison to referenced spectra. A sensor system employing the emitter/detector sensor-chip with gas cell and reflective optics is demonstrated and CO2 gas sensitivity limits are reported.

Paper Details

Date Published: 5 September 2002
PDF: 6 pages
Proc. SPIE 4815, Atmospheric Radiation Measurements and Applications in Climate, (5 September 2002); doi: 10.1117/12.482316
Show Author Affiliations
Mark P. McNeal, Ion Optics, Inc. (United States)
Nicholas Moelders, Ion Optics, Inc. (United States)
Martin U. Pralle, Ion Optics, Inc. (United States)
Irina Puscasu, Ion Optics, Inc. (United States)
Lisa Last, Ion Optics, Inc. (United States)
William Ho, Ion Optics, Inc. (United States)
Anton C. Greenwald, Ion Optics, Inc. (United States)
James T. Daly, Ion Optics, Inc. (United States)
Edward A. Johnson, Ion Optics, Inc. (United States)
Thomas George, Jet Propulsion Lab. (United States)

Published in SPIE Proceedings Vol. 4815:
Atmospheric Radiation Measurements and Applications in Climate
Joseph A. Shaw, Editor(s)

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