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Proceedings Paper

Electromechanical and optical properties of torsion-mirror actuators for optical switching applications
Author(s): Wen-Gang Wu; Dachao Li; Yilong Hao; Guizhen Yan; Shijiu Jin
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Paper Abstract

The electromechanical characteristics of a novel micro torsion-mirror actuator and the optical properties about the light scattering and reflection of its micro-mirror under the influence of mirror surface roughness are investigated experimentally and theoretically. The electrostatic yielding voltages for driving the metal-coated polysilicon or single crystal silicon micro-mirrors suspended by elastic torsion beams to tilt from 0° to 90° spontaneously are in the range of 270~290 V and the minimum holding voltages for keeping the tilting angle of the mirrors to be in 90° are found 55 V or so when the thickness of the torsion-beams is about 1 ?m. The lifetime and the estimated shortest actuating time of the micro torsion-mirror actuators can reach 108 at least and less than 2 ms, respectively. The maximum value of the surface roughness of the micro-mirrors is 69.443 nm and the distribution of the surface roughness is smooth, which is acceptable for wavelength division multiplexing applications basically. In general, the novel torsion-mirror actuators can be applied as optical switches for optical networking.

Paper Details

Date Published: 3 September 2002
PDF: 8 pages
Proc. SPIE 4907, Optical Switching and Optical Interconnection II, (3 September 2002); doi: 10.1117/12.482300
Show Author Affiliations
Wen-Gang Wu, Peking Univ. (China)
Dachao Li, Tianjin Univ. (China)
Yilong Hao, Peking Univ. (China)
Guizhen Yan, Peking Univ. (China)
Shijiu Jin, Tianjin Univ. (China)

Published in SPIE Proceedings Vol. 4907:
Optical Switching and Optical Interconnection II
Lih-Yuan Lin; Yimo Zhang; Kimio Oguchi, Editor(s)

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