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Proceedings Paper

Fabrication of planar blazed grating using laser LIGA
Author(s): Chi-Feng Chen; Rui-Ting Zheng; Bor-Hong Yao
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Paper Abstract

We study the design of planar micro-grating and propose a new approach to fabricate planar micro-grating. By the basic grating diffractive theory (rigorous coupled wave theory), suitable and optimized structure (within our manufacturing capabilities) of grating for our application is found. The fabrication of planar micro-grating is demonstrated by Laser LIGA technology, using the instrument of KrF (248 nm) excimer laser system. The micro-grating with the continuous smooth profile and the pitch 2.5 ?m is shown.

Paper Details

Date Published: 3 September 2002
PDF: 8 pages
Proc. SPIE 4907, Optical Switching and Optical Interconnection II, (3 September 2002); doi: 10.1117/12.482276
Show Author Affiliations
Chi-Feng Chen, Industrial Technology Research Institute (Taiwan)
Rui-Ting Zheng, Industrial Technology Research Institute (Taiwan)
Bor-Hong Yao, Industrial Technology Research Institute (Taiwan)

Published in SPIE Proceedings Vol. 4907:
Optical Switching and Optical Interconnection II
Lih-Yuan Lin; Yimo Zhang; Kimio Oguchi, Editor(s)

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