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Proceedings Paper

DWDM multiple-channel power equalizer using MEMS technology
Author(s): Xu Ming Zhang; Ai Qun Liu; Yue Chuan Lu; F. Wang; C. Lu
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Paper Abstract

This paper reports the design, modeling, fabrication and testing of a novel variable optical attenuator for multi-channel power equalizers to be used in dense wavelength division multiplexed (DWDM) systems. The attenuator is fabricated by silicon surface micromachining technology and is then manually assembled and integrated with two single mode optical fibers that act as optical input and output. A 40 um x 40 um mirror coated with gold is driven by a proprietary drawbridge structure to cut partially into the light path between two fibers, enabling the attenuation. The attenuator has a dimension of 0.6 mm x 1 mm excluding the fibers. It has 1.5 dB insertion loss and 45 dB attenuation range, and requires only 8 V driving voltage, showing that it is promising for DWDM applications. Optical and mechanical models of the attenuator have also been established. Although the models are developed with the initial intention of modeling the MEMS attenuator, they are also available to the other types of devices in which the preconditions of the models are satisfied.

Paper Details

Date Published: 3 September 2002
PDF: 12 pages
Proc. SPIE 4907, Optical Switching and Optical Interconnection II, (3 September 2002); doi: 10.1117/12.482273
Show Author Affiliations
Xu Ming Zhang, Nanyang Technological Univ. (Singapore)
Ai Qun Liu, Nanyang Technological Univ. (Singapore)
Yue Chuan Lu, National Univ. of Singapore (Singapore)
F. Wang, National Univ. of Singapore (Singapore)
C. Lu, Nanyang Technological Univ. (Singapore)


Published in SPIE Proceedings Vol. 4907:
Optical Switching and Optical Interconnection II
Lih-Yuan Lin; Yimo Zhang; Kimio Oguchi, Editor(s)

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