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Proceedings Paper

MEMS widely tunable lasers for WDM system applications
Author(s): Ai Qun Liu; Xu Ming Zhang; Ding Yuan Tang
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Paper Abstract

Tunable lasers have wide applications in DWDM systems to save inventory cost and to improve the optical network functionalities. The Microelectromechanical Systems (MEMS) technology has shown strong promise to miniaturize the conventional mechanical tunable lasers with adding merits of high compactness, high speed, batch production and so on. In this paper, external cavity tunable diode lasers using MEMS movable mirrors and rotary gratings as the external reflectors are presented. One tunable laser of 2 um x 1.5 um is formed by integration of a surface-micromachined 3D mirror with a diode laser and an optical fiber. A wavelength tuning range of 16 nm is obtained. In addition, deep-etched structures such rotary gratings, circular mirror, microlens, and grooves for diode laser and fiber are illustrated to form widely tunable lasers.

Paper Details

Date Published: 3 September 2002
PDF: 9 pages
Proc. SPIE 4907, Optical Switching and Optical Interconnection II, (3 September 2002); doi: 10.1117/12.482270
Show Author Affiliations
Ai Qun Liu, Nanyang Technological Univ. (Singapore)
Xu Ming Zhang, Nanyang Technological Univ. (Singapore)
Ding Yuan Tang, Nanyang Technological Univ. (Singapore)


Published in SPIE Proceedings Vol. 4907:
Optical Switching and Optical Interconnection II
Lih-Yuan Lin; Yimo Zhang; Kimio Oguchi, Editor(s)

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