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Proceedings Paper

Research of spatial resolution in external electro-optic probing
Author(s): Hongbo Zhang; Rui Wang; Kaixin Chen; Han Yang; Daming Zhang; Maobin Yi
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Paper Abstract

A new rnethod, based on zero point of longitudinal electric field, was used to deterrnine the spatial resolution of electro-optic (EO) probing systern. To examine the spatial resolution of internal and external EO probing systems, an interdigital structure is fabricated on GaAs substrate with and without a layer of Si02 between the electrode and the substrate respectively. Considering Si02 layer or air gap between electrode and EO crystal, the result of electro-optic probing was simulated which is well accorded with experiment. The result indicates that spatial resolution of less than 0.5um and lum are obtained in internal and external EO probing system respectively.

Paper Details

Date Published: 5 September 2002
PDF: 6 pages
Proc. SPIE 4913, Semiconductor Lasers and Applications, (5 September 2002); doi: 10.1117/12.482218
Show Author Affiliations
Hongbo Zhang, Jilin Univ. (China)
Rui Wang, Jilin Univ. (China)
Kaixin Chen, Jilin Univ. (China)
Han Yang, Jilin Univ. (China)
Daming Zhang, Jilin Univ. (China)
Maobin Yi, Jilin Univ. (China)


Published in SPIE Proceedings Vol. 4913:
Semiconductor Lasers and Applications
Yi Luo; Yoshiaki Nakano, Editor(s)

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