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Proceedings Paper

Optimal dynamic performance for high-precision actuators/stages
Author(s): Curt Preissner; Soon-Hong Lee; Thomas J. Royston; Deming Shu
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Paper Abstract

System dynamic performance of actuator/stage groups, such as those found in optical instrument positioning systems and other high-precision applications, is dependent upon both individual component behavior and the system configuration. Experimental modal analysis techniques were implemented to determine the six degree of freedom stiffnesses and damping for individual actuator components. These experimental data were then used in a multibody dynamic computer model to investigate the effect of stage group configuration. Running the computer model through the possible stage configurations and observing the predicted vibratory response determined the optimal stage group configuration. Configuration optimization can be performed for any group of stages, provided there is stiffness and damping data available for the constituent pieces.

Paper Details

Date Published: 9 September 2002
PDF: 9 pages
Proc. SPIE 4771, Optomechanical Design and Engineering 2002, (9 September 2002); doi: 10.1117/12.482149
Show Author Affiliations
Curt Preissner, Argonne National Lab. (United States)
Soon-Hong Lee, Argonne National Lab. (United States)
Thomas J. Royston, Univ. of Illinois/Chicago (United States)
Deming Shu, Argonne National Lab. (United States)

Published in SPIE Proceedings Vol. 4771:
Optomechanical Design and Engineering 2002
Alson E. Hatheway, Editor(s)

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