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Proceedings Paper

Linear actuator system with 1-Å closed-loop control resolution and 50-mm travel range
Author(s): Deming Shu; Yufeng Han; Thomas S. Toellner; Esen E. Alp
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Paper Abstract

We have designed and tested a novel linear actuator system with 1-angstrom closed-loop control resolution and 50-mm travel range. There are two major ultraprecision motion control techniques that have been applied to this actuator: A novel laser Doppler encoder system with multiple-reflection Optics. A specially designed high-stiffness weak-link mechanism with stacked thin metal sheets having sub-Angstrom driving sensitivity with excellent stability. In this paper, we present the system design and test results of this linear actuator. Applications of this new actuator system are also discussed. -Å

Paper Details

Date Published: 9 September 2002
PDF: 13 pages
Proc. SPIE 4771, Optomechanical Design and Engineering 2002, (9 September 2002); doi: 10.1117/12.482148
Show Author Affiliations
Deming Shu, Argonne National Lab. (United States)
Yufeng Han, Argonne National Lab. (United States)
Thomas S. Toellner, Argonne National Lab. (United States)
Esen E. Alp, Argonne National Lab. (United States)

Published in SPIE Proceedings Vol. 4771:
Optomechanical Design and Engineering 2002
Alson E. Hatheway, Editor(s)

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