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Proceedings Paper

EUV light source and laser considerations for scalability and high-energy conversion efficiency
Author(s): Ian P. Mercer; Andrew Comley; Sebastian Davis-Ansted; Michael Egan; Samir S. Ellwi; Paul Harrison; Ian Henderson; Matt Kelly; Michael Mason; Mark Middleton; Ian Morris; Duncan Parsons-Karavassilis; Terrance Nowell; Peter Raven; Adrain Russel; David R. Klug; Alan G. Taylor
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Paper Abstract

Electrical to EUV conversion efficiency is a key parameter for systems scaled to EUV emission in the 100W regime. Improvement in efficiency of conversion from laser radiation at the EUV source, reduces the required laser power and as such can lend itself to reduced heat load and debris emission. Also, improvement in the electrical to laser conversion efficiency results in a direct reduction in cost of ownership. Laser solutions optimised for efficient conversion to high M2 CW laser radiation are not optimised in design for efficient short-pulsed operation; the mode of operation required for EUV generation. Aspects of both EUV source and laser design are discussed, with a view to optimising conversion efficiency for scalable EUV solutions.

Paper Details

Date Published: 13 September 2002
PDF: 11 pages
Proc. SPIE 4760, High-Power Laser Ablation IV, (13 September 2002); doi: 10.1117/12.482129
Show Author Affiliations
Ian P. Mercer, Powerlase Ltd. (United Kingdom)
Andrew Comley, Powerlase Ltd. (United Kingdom)
Sebastian Davis-Ansted, Powerlase Ltd. (United Kingdom)
Michael Egan, Powerlase Ltd. (United Kingdom)
Samir S. Ellwi, Powerlase Ltd. (United Kingdom)
Paul Harrison, Powerlase Ltd. (United Kingdom)
Ian Henderson, Powerlase Ltd. (United Kingdom)
Matt Kelly, Powerlase Ltd. (United Kingdom)
Michael Mason, Powerlase Ltd. (United Kingdom)
Mark Middleton, Powerlase Ltd. (United Kingdom)
Ian Morris, Powerlase Ltd. (United Kingdom)
Duncan Parsons-Karavassilis, Powerlase Ltd. (United Kingdom)
Terrance Nowell, Powerlase Ltd. (United Kingdom)
Peter Raven, Powerlase Ltd. (United Kingdom)
Adrain Russel, Powerlase Ltd. (United Kingdom)
David R. Klug, Imperial College of Science, Technology, and Medicine (United Kingdom)
Alan G. Taylor, Imperial College of Science, Technology, and Medicine (United Kingdom)

Published in SPIE Proceedings Vol. 4760:
High-Power Laser Ablation IV
Claude R. Phipps, Editor(s)

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