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Proceedings Paper

Pump-probe extreme ultraviolet and x-ray studies of laser-droplet plasma dynamics
Author(s): Stuart J. McNaught; Jingyun Fan; Enrique Parra; Howard M. Milchberg
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Paper Abstract

A series of experiments has been performed to investigate the interaction of intense laser pulses with cryogenic noble gas droplets. Understanding of the time scales for this interaction is important for optimization of extreme ultraviolet (EUV) sources for next-generation lithography that utilize laser-produced plasmas. The temporal character of the plasma formed by the irradiation of micron-sized argon and krypton droplets with intense 200-mJ, 100-ps laser pulses was investigated using a pump-probe scheme. The evolution of the droplet plasma was assessed by monitoring delay-dependent x-ray and EUV emission, and by imaging frequency-doubled probe light scattered from the interaction region. Depending on the spectral region of interest and the droplet characteristics, the effective plasma lifetime extends from a few hundred picoseconds to several nanoseconds. These results are explained in terms of the plasma expansion, excitation emission, and recombination emission time scales.

Paper Details

Date Published: 13 September 2002
PDF: 8 pages
Proc. SPIE 4760, High-Power Laser Ablation IV, (13 September 2002); doi: 10.1117/12.482114
Show Author Affiliations
Stuart J. McNaught, Univ. of Maryland/College Park (United States)
Jingyun Fan, Univ. of Maryland/College Park (United States)
Enrique Parra, Univ. of Maryland/College Park (United States)
Howard M. Milchberg, Univ. of Maryland/College Park (United States)

Published in SPIE Proceedings Vol. 4760:
High-Power Laser Ablation IV
Claude R. Phipps, Editor(s)

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