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Proceedings Paper

Ablation of PMMA, PTFE, and Si by soft x-rays emitted from hot dense plasma
Author(s): Libor Juha; Josef Krasa; A. R. Praeg; A. Cejnarova; Dagmar Chvostova; J. Kravarik; P. Kubes; Yu. L. Bakshaev; A. S. Chernenko; V. D. Korolev; V. I. Tumanov; M. I. Ivanov; Marek Scholz; Leszek Ryc; Krzysztof Tomaszewski; R. Viskup; Frederick P. Boody; Jarmila Kodymova
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Paper Abstract

The efficiency and threshold of ablation of polymethylmethacrylate (PMMA), polytetrafluoroethylene (PTFE), and monocrystalline silicon by single pulses of soft x-rays emitted from Z-pinch, plasma-focus, and laser-produced plasmas were investigated. The Z-pinch was driven by the S-300 pulsed-power machine (Kurchatov Institute, Moscow) and the plasma focus was realized in the PF-1000 machine (Institute of Plasma Physics and Laser Microfusion, Warsaw). Higher temperature plasma than with the discharge plasmas was obtained by focusing the near-infrared beam from the PALS high-power iodine laser system (Czech Academy of Sciences, Prague) on the surface of a metallic slab target. The role of nonthermal processes in x-ray ablation was evaluated. Possible ways to use x-ray ablation for micromachining are discussed.

Paper Details

Date Published: 13 September 2002
PDF: 8 pages
Proc. SPIE 4760, High-Power Laser Ablation IV, (13 September 2002); doi: 10.1117/12.482076
Show Author Affiliations
Libor Juha, Institute of Physics (Czech Republic)
Josef Krasa, Institute of Physics (Czech Republic)
A. R. Praeg, Institute of Physics (Czech Republic)
A. Cejnarova, Institute of Physics (Czech Republic)
Dagmar Chvostova, Institute of Physics (Czech Republic)
J. Kravarik, Czech Technical Univ. (Czech Republic)
P. Kubes, Czech Technical Univ. (Czech Republic)
Yu. L. Bakshaev, Kurchatov Institute (Russia)
A. S. Chernenko, Kurchatov Institute (Russia)
V. D. Korolev, Kurchatov Institute (Russia)
V. I. Tumanov, Kurchatov Institute (Russia)
M. I. Ivanov, Research Institute of Pulsed Systems (Russia)
Marek Scholz, Institute of Plasma Physics and Laser Microfusion (Poland)
Leszek Ryc, Institute of Plasma Physics and Laser Microfusion (Poland)
Krzysztof Tomaszewski, Institute of Plasma Physics and Laser Microfusion (Poland)
R. Viskup, Univ. of Bratislava (Slovak Republic)
Frederick P. Boody, Ion Light Technologies GmbH (Germany)
Jarmila Kodymova, Institute of Physics (Czech Republic)


Published in SPIE Proceedings Vol. 4760:
High-Power Laser Ablation IV
Claude R. Phipps, Editor(s)

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