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Proceedings Paper

Micro-optic fabrication using laser ablation process
Author(s): Won-Seok Chang; Kyung-Ku Yoon; Jaegu Kim; Bosung Shin; Kyung-Hyun Whang
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Paper Abstract

The feasibility of laser ablation in micro-machining of 3D structure of MEMS (Micro Electro Mechanical Systems) parts, specifically micro optics was studied in this paper. The micro-machining characteristics of polymer such as etching rate vs. energy fluence, number of pulse are investigated experimentally. The threshold energy density of polyurethane is about 30 mJ/cm2 and ablated depth per pulse can be precisely controlled in the range of 0.1-0.8μm by the attenuation of energy fluence. By mask moving technique, the micro prism, cylindrical lens and inclined surface were fabricated. These 3D structures can be used as master in electro-plating mold. This paper also summarized the work on the development of a simulation program for modeling the process of machining quasi-three dimensional shapes with the excimer laser beam on a constant moving polymer. Relatively simple masks of rectangle, triangle and half circle shape are considered. The etching depth is calculated by considering the number of laser pulses and the wavelength of laser beam irradiated on the various specimen surface such as PMMA, polyurethane and PI. It was found that similar shapes as experimental results, mask shape was designed to gain-lens surface which we want. As another method to manufacture micro lens the mask is made circular type and rotated during laser beam illumination. Opened mask area and scanning speed determine the surface shape of lens. Precise control of various parameters is admitted to fabricate micro optics.

Paper Details

Date Published: 13 September 2002
PDF: 10 pages
Proc. SPIE 4760, High-Power Laser Ablation IV, (13 September 2002); doi: 10.1117/12.482060
Show Author Affiliations
Won-Seok Chang, Korea Institute of Machinery and Materials (South Korea)
Kyung-Ku Yoon, Korea Institute of Machinery and Materials (South Korea)
Jaegu Kim, Korea Institute of Machinery and Materials (South Korea)
Bosung Shin, Korea Institute of Machinery and Materials (South Korea)
Kyung-Hyun Whang, Korea Institute of Machinery and Materials (South Korea)

Published in SPIE Proceedings Vol. 4760:
High-Power Laser Ablation IV
Claude R. Phipps, Editor(s)

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