Share Email Print
cover

Proceedings Paper

Micrograting formation with femtosecond ultraviolet laser on optical materials
Author(s): Hayato Kamioka; Kenichi Kawamura; Taisuke Miura; Masahiro Hirano; Hideo Hosono
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

The ability of UV femtosecond laser pulse to fabricate the fine-pitched microgratings on fused silica or ZnO surfaces has been demonstrated through a two-beam laser interference technique. A pump and probe method has been developed to find the time coincidence of the two UV pulses through a laser-induced optical Kerr effect or transient transmission change. The UV pulses achieve to narrow the grating pitches as small as 290nm. The establishment of the technique provides a novel opportunity for the fabrication of periodic nanoscale structures in various materials.

Paper Details

Date Published: 13 September 2002
PDF: 8 pages
Proc. SPIE 4760, High-Power Laser Ablation IV, (13 September 2002); doi: 10.1117/12.482057
Show Author Affiliations
Hayato Kamioka, Japan Science and Technology Corp. (Japan)
Kenichi Kawamura, Japan Science and Technology Corp. (Japan)
Taisuke Miura, Japan Science and Technology Corp. (Japan)
Masahiro Hirano, Japan Science and Technology Corp. (Japan)
Hideo Hosono, Tokyo Institute of Technology (Japan)


Published in SPIE Proceedings Vol. 4760:
High-Power Laser Ablation IV
Claude R. Phipps, Editor(s)

© SPIE. Terms of Use
Back to Top