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Proceedings Paper

Laser-assisted nanofabrications on metal surfaces with optical near-field effects
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Paper Abstract

Laser directly writing of nanostructures on metal film surfaces with optical near field effects has been investigated. Spherical silica particles (500-1000 nm) were placed on metal films. After laser illumination with a pulsed ultraviolet laser, naoholes were obtained at the original position of the particles. The mechanism of the formation of nanostructure pattern was investigated and found to be the near-field optical resonance effect induced by particles on the surface. The size of the nanohole has been studied as a function of laser fluence and silica particle size. A comparison with relative theoretical calculations of near-field light intensity distribution showed good agreement with the experiment results. The method of particle enhanced laser irradiation allows the study of field enhancement effects as well as its potential applications for nanolithography.

Paper Details

Date Published: 13 September 2002
PDF: 7 pages
Proc. SPIE 4760, High-Power Laser Ablation IV, (13 September 2002); doi: 10.1117/12.482051
Show Author Affiliations
Sumei Huang, National Univ. of Singapore (Singapore)
Ming Hui Hong, National Univ. of Singapore (Singapore)
Boris S. Luk'yanchuk, National Univ. of Singapore (Singapore)
Yongfeng Lu, National Univ. of Singapore (United States)

Published in SPIE Proceedings Vol. 4760:
High-Power Laser Ablation IV
Claude R. Phipps, Editor(s)

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