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Proceedings Paper

Nonlinear effects in hidden picture amplification and contrast improvement in polymer electron and Roentgenoresist PMMA
Author(s): A. P. Aleksandrov; Vladimir N. Genkin; M. Yu. Myl'nikov; Nikolay V. Rukhman
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Paper Abstract

Some aspects of the laser light-polymer resist interaction are discussed. A possible way to increase the sensitivity and contrast is shown. 1. The laser chemicai technologies are widely used in indust- ryfi]. Here we analyze the laser capabilities of solving some elect- ron and roentgenolitography problems. It is shown, that the problems of polymer resist low sensitivity and contrast can be solved by light modification [2, 3].

Paper Details

Date Published: 1 December 1991
PDF: 12 pages
Proc. SPIE 1440, Optical Radiation Interaction with Matter, (1 December 1991); doi: 10.1117/12.48182
Show Author Affiliations
A. P. Aleksandrov, Institute of Applied Physics (Russia)
Vladimir N. Genkin, Institute of Applied Physics (Russia)
M. Yu. Myl'nikov, Institute of Applied Physics (Russia)
Nikolay V. Rukhman, Institute of Applied Physics (Russia)

Published in SPIE Proceedings Vol. 1440:
Optical Radiation Interaction with Matter
Alexey M. Bonch-Bruevich; Vitali I. Konov; Mikhail N. Libenson, Editor(s)

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