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Proceedings Paper

Dislocation mechanism of periodical relief formation in laser-irradiated silicon
Author(s): Galina D. Shandybina
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Paper Abstract

The dynamics of surface relief changes and thermal deformation in semiconductors are investigated with respect to radiation power density during laser pulses. A thermomechanical model of periodical relief formation is suggested.

Paper Details

Date Published: 1 December 1991
PDF: 6 pages
Proc. SPIE 1440, Optical Radiation Interaction with Matter, (1 December 1991); doi: 10.1117/12.48174
Show Author Affiliations
Galina D. Shandybina, Leningrad Institute of Fine Mechanics and Optics (Russia)

Published in SPIE Proceedings Vol. 1440:
Optical Radiation Interaction with Matter

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