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Proceedings Paper

Development of lithography technologies
Author(s): Jiang Jun
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Paper Abstract

Optical manufacturing is very important to semiconductor, photonics and MEMS, and lithography is a core part of optical manufacturing. The development of lithography technologies, such as coating, exposure, resist and thick resist lithography, are mainly introduced.

Paper Details

Date Published: 5 September 2002
PDF: 9 pages
Proc. SPIE 4921, Optical Manufacturing Technologies, (5 September 2002); doi: 10.1117/12.481731
Show Author Affiliations
Jiang Jun, Kunming Institute of Physics (China)

Published in SPIE Proceedings Vol. 4921:
Optical Manufacturing Technologies
Yimo Zhang; Wenyao Liu; Harvey M. Pollicove, Editor(s)

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