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Proceedings Paper

Study of stress distribution on nano-polycrystalline silicon thin film with Raman imaging spectrum
Author(s): Xiao xuan Xu; Hai bo Lin; Zhong chen Wu; Hong bo Li; Cun zhou Zhang
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Paper Details

Date Published: 5 September 2002
PDF: 7 pages
Proc. SPIE 4923, Nano-Optics and Nano-Structures, (5 September 2002); doi: 10.1117/12.481723
Show Author Affiliations
Xiao xuan Xu, Nankai Univ. (China)
Hai bo Lin, Nankai Univ. (China)
Zhong chen Wu, Nankai Univ. (China)
Hong bo Li, Nankai Univ. (China)
Cun zhou Zhang, Nankai Univ. (China)

Published in SPIE Proceedings Vol. 4923:
Nano-Optics and Nano-Structures
Xing Zhu; Stephen Y. Chou; Yasuhiko Arakawa, Editor(s)

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