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Proceedings Paper

Optimization of photo-induced polymer microstructuration using atomic force microscopy
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Paper Details

Date Published: 5 September 2002
PDF: 9 pages
Proc. SPIE 4923, Nano-Optics and Nano-Structures, (5 September 2002); doi: 10.1117/12.481707
Show Author Affiliations
Christiane Carre Morlet-Savary, Ecole Nationale Superieure de Chimie de Mulhouse (France)
Mathieu Feuillade, Ecole Nationale Superieure de Chimie de Mulhouse (France)
Gilles Pauliat, Ctr. Scientifique d'Orsay (France)
Carole Ecoffet, Ecole Nationale Superieure de Chimie de Mulhouse (France)


Published in SPIE Proceedings Vol. 4923:
Nano-Optics and Nano-Structures
Xing Zhu; Stephen Y. Chou; Yasuhiko Arakawa, Editor(s)

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