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Proceedings Paper

Self-organized LPE growth of Al0.3Ga0.3As microtips for integrated SNOM sensors
Author(s): Yingmei Su; Lizhong Hu; Jie Sun; Qingduan Meng; Yu Zhao; Zhaoyang Wang
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Paper Abstract

Scanning near-field optical microscope (SNOM) is a new photoelectrical tool for the research down to nanomcter scale. Recently, Gorecki et al. have proposed a promising archltectLlre ofmonolithic integrated miniature SNOM sensors composed of only three elements (a PIN detector, a VCSEL and a microtip) and have developed a wet etching method of fabricating GaAs microtips. However, the etching process can hardly be controlled precisely. In this report, we propose an improved technique for manufacturing Al0.3Ga0.7As microtips grown by self-assembled liquid-phase epitaxy (LPE) for integrated SNOM sensors. In conventional LPE growing process, we used the properties that AIGaAs surface can be easily partialy oxided and can spontaneously create micrometer-sized windows to grow pyramid-like microtips in the windows self-organizedly. Using this technique, the miniature pyramid-like probes can be directly grown onto the external facet of the VCSEL.

Paper Details

Date Published: 5 September 2002
PDF: 6 pages
Proc. SPIE 4923, Nano-Optics and Nano-Structures, (5 September 2002); doi: 10.1117/12.481705
Show Author Affiliations
Yingmei Su, Dalian Univ. of Technology (China)
Lizhong Hu, Dalian Univ. of Technology (China)
Jie Sun, Dalian Univ. of Technology (China)
Qingduan Meng, Dalian Univ. of Technology (China)
Yu Zhao, Dalian Univ. of Technology (China)
Zhaoyang Wang, Dalian Univ. of Technology (China)


Published in SPIE Proceedings Vol. 4923:
Nano-Optics and Nano-Structures
Xing Zhu; Stephen Y. Chou; Yasuhiko Arakawa, Editor(s)

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