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Proceedings Paper

Diffraction-based analysis of effects of fabricating and installation errors on a nano-alignment system
Author(s): Yuhang Chen; Wenhao Huang
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Paper Details

Date Published: 30 August 2002
PDF: 7 pages
Proc. SPIE 4924, Holography, Diffractive Optics, and Applications, (30 August 2002); doi: 10.1117/12.481517
Show Author Affiliations
Yuhang Chen, Univ. of Science and Technology of China (China)
Wenhao Huang, Univ. of Science and Technology of China (China)


Published in SPIE Proceedings Vol. 4924:
Holography, Diffractive Optics, and Applications
Dahsiung Hsu; Jiabi Chen; Yunlong Sheng, Editor(s)

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