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Proceedings Paper

Simulation of optical lithography process for fabricating diffractive optics
Author(s): Xiao Xiao; Jing Yang; Jinglei Du; Yongkang Guo; Chunlei Du
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Paper Details

Date Published: 30 August 2002
PDF: 7 pages
Proc. SPIE 4924, Holography, Diffractive Optics, and Applications, (30 August 2002); doi: 10.1117/12.481514
Show Author Affiliations
Xiao Xiao, Sichuan Univ. (China)
Jing Yang, Sichuan Univ. (China)
Jinglei Du, Sichuan Univ. (China)
Yongkang Guo, Sichuan Univ. (China)
Chunlei Du, Institute of Optics and Electronics (China)


Published in SPIE Proceedings Vol. 4924:
Holography, Diffractive Optics, and Applications
Dahsiung Hsu; Jiabi Chen; Yunlong Sheng, Editor(s)

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