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Proceedings Paper

Surface relief micro-optical elements built in hybrid sol-gel glass
Author(s): XiaoCong Yuan; W. X. Yu; Shaohua Tao; Wai Chye Cheong; V. Koudriachov; Nam Quoc Ngo
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Paper Abstract

In micro-optical elements design, in order to achieve an optimal performance and reduce the undesired background optical system noise, multilevel phase-only micro-optical elements and/or continuous-relief structures are required. The multilevel and continuous relief structures can be fabricated by multiple exposures through a set of binary masks, electron-beam direct writing, laser-beam direct writing and grey scale masks. For mass production of cost-effective monolithic micro-optical elements, the high-energy beam-sensitive (HEBS) glass offers an opportunity to generate a grey-scale mask for analogue 3D surface relief structures. In this paper, a negative-tone inorganic-organic hybrid SiO2/TiO2 glass is investigated for the fabrication of refractive and diffractive micro-optical elements. The sol-gel material enjoys an advantage over the conventional photoresist based fabrication techniques due to its single step etching-free process.

Paper Details

Date Published: 30 August 2002
PDF: 6 pages
Proc. SPIE 4924, Holography, Diffractive Optics, and Applications, (30 August 2002); doi: 10.1117/12.481509
Show Author Affiliations
XiaoCong Yuan, Nanyang Technological Univ. (Singapore)
W. X. Yu, Nanyang Technological Univ. (Singapore)
Shaohua Tao, Nanyang Technological Univ. (Singapore)
Wai Chye Cheong, Nanyang Technological Univ. (Singapore)
V. Koudriachov, Nanyang Technological Univ. (Singapore)
Nam Quoc Ngo, Nanyang Technological Univ. (Singapore)


Published in SPIE Proceedings Vol. 4924:
Holography, Diffractive Optics, and Applications
Dahsiung Hsu; Jiabi Chen; Yunlong Sheng, Editor(s)

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