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Proceedings Paper

Micro-optical elements made of silver-halide sensitized gelatin etched by enzyme with real-time mask
Author(s): Yongkang Guo; Qinjun Peng; Jianhua Zhu; Yangsu Zeng; Shijie Liu; Chunlei Du
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Paper Abstract

In this paper a new method has been developed for fabricating micro-optical element by exposing silver-halide sensitized gelatin (SHSG) through real-time mask and etching SHSG with enzyme solution. The principle of etching SHSG with enzyme solution is given in detail and the optimum technique parameters of this process are presented, furthermore the theoretical analysis and solving scheme for the nonlinearities which come from the absorption of light energy by film are given. It is experimentally obtained a good linear relationship in a range of 4µm deep. At last, the micro-cylindrical lens and micro axicon array are achieved by experiment, and the results are evaluated for experiments by stylus profiling instrument and interference microscope.

Paper Details

Date Published: 30 August 2002
PDF: 7 pages
Proc. SPIE 4924, Holography, Diffractive Optics, and Applications, (30 August 2002); doi: 10.1117/12.481499
Show Author Affiliations
Yongkang Guo, Sichuan Univ. (China)
Qinjun Peng, Sichuan Univ. (China)
Jianhua Zhu, Sichuan Univ. (China)
Yangsu Zeng, Sichuan Univ. (China)
Shijie Liu, Sichuan Univ. (China)
Chunlei Du, Institute of Optics and Electronics (China)


Published in SPIE Proceedings Vol. 4924:
Holography, Diffractive Optics, and Applications
Dahsiung Hsu; Jiabi Chen; Yunlong Sheng, Editor(s)

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