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Proceedings Paper

Computer modeling of the dynamics of nanosecond laser annealing of amorphous thin silicon layers
Author(s): Sergei P. Zhvavyi; Olga L. Sadovskaya
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Paper Details

Date Published: 1 December 1991
PDF: 8 pages
Proc. SPIE 1440, Optical Radiation Interaction with Matter, (1 December 1991); doi: 10.1117/12.48129
Show Author Affiliations
Sergei P. Zhvavyi, Institute of Electronics (Belarus)
Olga L. Sadovskaya, Institute of Electronics (Belarus)


Published in SPIE Proceedings Vol. 1440:
Optical Radiation Interaction with Matter

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