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Proceedings Paper

Influence on the film properties of torch inclination angle in the FHD process
Author(s): Yong-Gon Seo; Sang-Hee Shin; Oh-Duk Kwon; Byung-Moon Lee; Yong-Tak Kim; Dae-Ho Yoon; Hyung-Do Yoon; Je-Min Kim; Young-Min Im
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Paper Details

Date Published: 28 August 2002
PDF: 4 pages
Proc. SPIE 4904, Optical Fiber and Planar Waveguide Technology II, (28 August 2002); doi: 10.1117/12.481246
Show Author Affiliations
Yong-Gon Seo, Korea Electronics Technology Institute (South Korea)
Sang-Hee Shin, SemiTel Co., Ltd. (South Korea)
Oh-Duk Kwon, SemiTel Co., Ltd. (South Korea)
Byung-Moon Lee, SemiTel Co., Ltd. (South Korea)
Yong-Tak Kim, Sungkyunkwan Univ. (South Korea)
Dae-Ho Yoon, Sungkyunkwan Univ. (South Korea)
Hyung-Do Yoon, Korea Electronics Technology Institute (South Korea)
Je-Min Kim, Korea Electronics Technology Institute (South Korea)
Young-Min Im, Korea Electronics Technology Institute (South Korea)


Published in SPIE Proceedings Vol. 4904:
Optical Fiber and Planar Waveguide Technology II
Shuisheng Jian; Steven Shen; Katsunari Okamoto, Editor(s)

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