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Proceedings Paper

Fabrication and measurement of polymer/Si arrayed waveguide grating multiplexer
Author(s): Fei Wang; Yu Zhao; Daming Zhang; Zhanchen Cui; Maobin Yi; Shiyong Liu; Wei Sun
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Paper Abstract

In this paper, a 9 X 9 Polymer/Si AWG was designed and fabricated. The cladding material is poly-methyl-methacrylate-co-glyciclyl methacrylate (PMMA-GMA) and the core material is the mixture of PMMA-GMA and bis-phonel-A epoxy. During the fabrication process of the Polymer/Si AWG device, We used aluminum as mask on polymer instead of conventional photoresist as mask. The results show that the device is good for the wavelength division multiplexing (WDM) system. The output characteristics of the device were measured by a system based on the tapered fiber. The results show that our polymer/Si AWG meets the designed device well.

Paper Details

Date Published: 29 August 2002
PDF: 4 pages
Proc. SPIE 4905, Materials and Devices for Optical and Wireless Communications, (29 August 2002); doi: 10.1117/12.480995
Show Author Affiliations
Fei Wang, Jilin Univ. (China)
Yu Zhao, Jilin Univ. (China)
Daming Zhang, Jilin Univ. (China)
Zhanchen Cui, Jilin Univ. (China)
Maobin Yi, Jilin Univ. (China)
Shiyong Liu, Jilin Univ. (China)
Wei Sun, Jilin Univ. (China)


Published in SPIE Proceedings Vol. 4905:
Materials and Devices for Optical and Wireless Communications
Constance J. Chang-Hasnain; YuXing Xia; Kenichi Iga, Editor(s)

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