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Proceedings Paper

Grating interferometry applied to polymeric surfaces of microcomponents
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Proc. SPIE 4980, Reliability, Testing, and Characterization of MEMS/MOEMS II, ; doi: 10.1117/12.480766
Show Author Affiliations
Claas Falldorf, Bremer Institut fuer Angewandte Strahltechnik (Germany)
Carsten Wochnowski, Bremer Institut fuer Angewandte Strahltechnik (Germany)
Stefan Osten, Bremer Institut fuer Angewandte Strahltechnik (Germany)
Wolfgang Osten, Bremer Institut fuer Angewandte Strahltechnik (Germany)
Werner P. O. Jueptner, Bremer Institut fuer Angewandte Strahltechnik (Germany)


Published in SPIE Proceedings Vol. 4980:
Reliability, Testing, and Characterization of MEMS/MOEMS II
Rajeshuni Ramesham; Danelle M. Tanner, Editor(s)

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