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Proceedings Paper

Microelectromechanical optical switch
Author(s): Nikolay Ivanovich Mukhurov; Georgy I. Efremov
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Paper Abstract

Have developed relatively simple and compact design of microelectromechanical optical switch of electrostatic type containing cardan structure including two movable elements: the outer one, in central part of which the mirror is formed, and which perform beam scanning along the X axis, and the inner one which deflect beam along the Y axis. The movable elements and the basis are connected successively by the torsion pairs positioned along the mutually perpendicular axes. Originality of the design consists in fabrication of inner element in the form of plate having in its central part the cavity, on the bottom of which the electrodes are formed to turn the inner element. The axes of both pairs of torsions and mirror being positioned in the same plane. The distinctive feature of the switch operation is independence and constancy of the mirror position under any order of signals supply to the control movable and unmoveable electrodes. Corresponding theoretical calculations have been performed, and optimum relations of constructive elements sizes are presented. The switch provides enhancement of spatial addressing precision, reducing of mass and dimension parameters, control apparatus simplification.

Paper Details

Date Published: 21 January 2003
PDF: 5 pages
Proc. SPIE 4983, MOEMS and Miniaturized Systems III, (21 January 2003); doi: 10.1117/12.480764
Show Author Affiliations
Nikolay Ivanovich Mukhurov, Institute of Electronics (Belarus)
Georgy I. Efremov, Institute of Electronics (Belarus)

Published in SPIE Proceedings Vol. 4983:
MOEMS and Miniaturized Systems III
James H. Smith, Editor(s)

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