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Proceedings Paper

Broadly tunable thin-film intereference coatings: active thin films for telecom applications
Author(s): Lawrence H. Domash; Eugene Y. Ma; Mark T. Lourie; Wayne F. Sharfin; Matthias Wagner
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Paper Abstract

Thin film interference coatings (TFIC) are the most widely used optical technology for telecom filtering, but until recently no tunable versions have been known except for mechanically rotated filters. We describe a new approach to broadly tunable TFIC components based on the thermo-optic properties of semiconductor thin films with large thermo-optic coefficients 3.6X10[-4]/K. The technology is based on amorphous silicon thin films deposited by plasma-enhanced chemical vapor deposition (PECVD), a process adapted for telecom applications from its origins in the flat-panel display and solar cell industries. Unlike MEMS devices, tunable TFIC can be designed as sophisticated multi-cavity, multi-layer optical designs. Applications include flat-top passband filters for add-drop multiplexing, tunable dispersion compensators, tunable gain equalizers and variable optical attenuators. Extremely compact tunable devices may be integrated into modules such as optical channel monitors, tunable lasers, gain-equalized amplifiers, and tunable detectors.

Paper Details

Date Published: 17 June 2003
PDF: 7 pages
Proc. SPIE 4989, Optical Devices for Fiber Communication IV, (17 June 2003); doi: 10.1117/12.479819
Show Author Affiliations
Lawrence H. Domash, Aegis Semiconductor, Inc. (United States)
Eugene Y. Ma, Aegis Semiconductor, Inc. (United States)
Mark T. Lourie, Aegis Semiconductor, Inc. (United States)
Wayne F. Sharfin, Aegis Semiconductor, Inc. (United States)
Matthias Wagner, Aegis Semiconductor, Inc. (United States)


Published in SPIE Proceedings Vol. 4989:
Optical Devices for Fiber Communication IV
Michel J. F. Digonnet, Editor(s)

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