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Proceedings Paper

Diode-pumped TEM00 mode solid state lasers and their micromachining applications
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Paper Abstract

During the last decade, diode-pumped TEM00 mode solid state lasers have gained widespread application in micromachining of dielectrics and metals. Commercial systems with output powers of up to 40W at 1064nm, 20W at 532nm, 15W at 355nm and 2W at 266nm, repetition rates of up to 400kHz and pulse durations between 10ns and 100ns are now being used in numerous micromachining applications. In addition, industrial applications of modelocked lasers are starting to emerge. This paper will give an overview of the state-of the art of diode-pumped TEM00 mode solid state lasers and their applications in micromachining.

Paper Details

Date Published: 17 October 2003
PDF: 14 pages
Proc. SPIE 4977, Photon Processing in Microelectronics and Photonics II, (17 October 2003); doi: 10.1117/12.479574
Show Author Affiliations
Norman Hodgson, Spectra-Physics, Inc. (United States)
Mingwei Li, Spectra-Physics, Inc. (United States)
Andy Held, Spectra-Physics, Inc. (United States)
Arnd K. Krueger, Spectra-Physics, Inc. (United States)


Published in SPIE Proceedings Vol. 4977:
Photon Processing in Microelectronics and Photonics II
Alberto Piqué; Koji Sugioka; Peter R. Herman; Jim Fieret; David B. Geohegan; Frank Träger; Kouichi Murakami; Friedrich G. Bachmann; Jan J. Dubowski; Willem Hoving; Kunihiko Washio, Editor(s)

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