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Proceedings Paper

Laser micromachining in the microelectronics industry: emerging applications
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Paper Abstract

Emerging applications in the microelectronics industry impose special manufacturing requirements that are not well addressed by conventional manufacturing techniques. On the other hand, advances in laser technology, optics and beam steering combined with a better understanding of laser-material interaction make laser micromachining a viable, attractive, cost-effective and in some cases enabling technology to support these applications. This paper reviews some of the emerging applications in the microelectronics industry that are well served by laser micromachining and discusses the advancements in lasers, optics and beam steering that enable cost effective laser micromachining. It also discusses some open issues that are the subject of current and future research.

Paper Details

Date Published: 17 October 2003
PDF: 10 pages
Proc. SPIE 4977, Photon Processing in Microelectronics and Photonics II, (17 October 2003); doi: 10.1117/12.479555
Show Author Affiliations
Pradeep K. Subrahmanyan, Electro Scientific Industries, Inc. (United States)

Published in SPIE Proceedings Vol. 4977:
Photon Processing in Microelectronics and Photonics II
Alberto Piqué; Koji Sugioka; Peter R. Herman; Jim Fieret; David B. Geohegan; Frank Träger; Kouichi Murakami; Friedrich G. Bachmann; Jan J. Dubowski; Willem Hoving; Kunihiko Washio, Editor(s)

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