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Proceedings Paper

Holographic fabrication of micron structures using interfered femtosecond laser beams split by diffractive optics
Author(s): Yoshiki Nakata; Tatsuo Okada; Mitsuo Maeda
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Paper Abstract

A line of periodic dot structure was fabricated on and inside materials by laser-induced modification with interfered femtosecond laser beams split by a diffractive optics. In addition, dot matrix and comb structures were fabricated with transportation of a sample at arbitrary speeds. These structures worked as transmission and reflection gratings. In addition, nanowires were fabricated by peeling the comb structure. Dot matrix was also formed by a single shot of laser ablation with four interfering beams.

Paper Details

Date Published: 17 October 2003
PDF: 12 pages
Proc. SPIE 4977, Photon Processing in Microelectronics and Photonics II, (17 October 2003); doi: 10.1117/12.479546
Show Author Affiliations
Yoshiki Nakata, Kyushu Univ. (Japan)
Tatsuo Okada, Kyushu Univ. (Japan)
Mitsuo Maeda, Kyushu Univ. (Japan)


Published in SPIE Proceedings Vol. 4977:
Photon Processing in Microelectronics and Photonics II
Alberto Piqué; Koji Sugioka; Peter R. Herman; Jim Fieret; David B. Geohegan; Frank Träger; Kouichi Murakami; Friedrich G. Bachmann; Jan J. Dubowski; Willem Hoving; Kunihiko Washio, Editor(s)

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