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Proceedings Paper

Corrections of aberrations using HOEs in UV and visible imaging systems
Author(s): Zishao Yang; Klaus-Juergen Rosenbruch
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Paper Abstract

Advantages and shortcomings of the use of HOE for imaging systems are demonstrated by examples: high aperture 1:1 and 5:1 imaging systems for the wavelength 193 nm to be used for lithography and an innovative achromatic holographic doublet. 1.

Paper Details

Date Published: 1 January 1991
PDF: 5 pages
Proc. SPIE 1354, 1990 Intl Lens Design Conf, (1 January 1991); doi: 10.1117/12.47954
Show Author Affiliations
Zishao Yang, Physikalisch-Technische Bundesanstalt (Germany)
Klaus-Juergen Rosenbruch, Physikalisch-Technische Bundesanstalt (Germany)

Published in SPIE Proceedings Vol. 1354:
1990 Intl Lens Design Conf
George N. Lawrence, Editor(s)

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