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Proceedings Paper

Thermal and fluid processes of a thin melt zone during femtosecond laser ablation of glass
Author(s): Adela Ben-Yakar; Anthony Harkin; Jacqueline Ashmore; Mengyan Shen; Eric Mazur; Robert L. Byer; Howard A. Stone
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Paper Abstract

Microfluidic channels on borosilicate glass are machined using femtosecond lasers. The morphology of the ablated surface is studied using scanning microscopy. The results show micron scale features inside the channels. The formation mechanism of these features is investigated by additional experiments accompanied by a theoretical analysis of the thermal and fluid processes involved in the ultrafast laser ablation process. These studies indicate the existence of a very thin melting zone on glass and suggest that the surface morphology is formed by the plasma pressure-driven fluid motion of the melting zone during the ablation process.

Paper Details

Date Published: 17 October 2003
PDF: 11 pages
Proc. SPIE 4977, Photon Processing in Microelectronics and Photonics II, (17 October 2003); doi: 10.1117/12.479527
Show Author Affiliations
Adela Ben-Yakar, Stanford Univ. (United States)
Anthony Harkin, Harvard Univ. (United States)
Jacqueline Ashmore, Harvard Univ. (United States)
Mengyan Shen, Harvard Univ. (United States)
Eric Mazur, Harvard Univ. (United States)
Robert L. Byer, Stanford Univ. (United States)
Howard A. Stone, Harvard Univ. (United States)


Published in SPIE Proceedings Vol. 4977:
Photon Processing in Microelectronics and Photonics II
Alberto Piqué; Koji Sugioka; Peter R. Herman; Jim Fieret; David B. Geohegan; Frank Träger; Kouichi Murakami; Friedrich G. Bachmann; Jan J. Dubowski; Willem Hoving; Kunihiko Washio, Editor(s)

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