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Proceedings Paper

Material development and processing for electro-optic device systems
Author(s): Danliang Jin; Raluca Dinu; Timothy Parker; Anna Barklund; Lou Bintz; Baoquan Chen; Christoph Flaherty; Hann Wen Guan; Diyun Huang; Jeffrey Kressbach; Timothy Londergan; Thomas Mino; Galina Todorova; Simon Yang
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Paper Abstract

New crosslinked clad polymers were developed for electro-optic polymer modulators with special attention paid to properties such as refractive index tunability, optical loss, and conductivity. These cured polymers showed relatively low optical loss at 1550 nm and desirable conductivity. The clads were used to fabricate electro-optic devices having mode profiles closely matched to that of optical fibers in order to reduce insertion loss. A new hardmasking technique was developed to define Mach-Zehnder rib waveguides by photolithography and dry etching with high reliability and surface smoothness. The hardmasking technique demonstrated flexibility in defining waveguides made with electro-optic polymers having different reactivity towards etchant gasses.

Paper Details

Date Published: 14 July 2003
PDF: 11 pages
Proc. SPIE 4991, Organic Photonic Materials and Devices V, (14 July 2003); doi: 10.1117/12.479448
Show Author Affiliations
Danliang Jin, Lumera Corp. (United States)
Raluca Dinu, Lumera Corp. (United States)
Timothy Parker, Lumera Corp. (United States)
Anna Barklund, Lumera Corp. (United States)
Lou Bintz, Lumera Corp. (United States)
Baoquan Chen, Lumera Corp. (United States)
Christoph Flaherty, Lumera Corp. (United States)
Hann Wen Guan, Lumera Corp. (United States)
Diyun Huang, Lumera Corp. (United States)
Jeffrey Kressbach, Lumera Corp. (United States)
Timothy Londergan, Lumera Corp. (United States)
Thomas Mino, Lumera Corp. (United States)
Galina Todorova, Lumera Corp. (United States)
Simon Yang, Lumera Corp. (United States)

Published in SPIE Proceedings Vol. 4991:
Organic Photonic Materials and Devices V
James G. Grote; Toshikuni Kaino, Editor(s)

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