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Proceedings Paper

Review of the 2001 ITRS update
Author(s): Gilbert V. Shelden
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Paper Details

Date Published: 16 August 2002
PDF: 9 pages
Proc. SPIE 4764, 18th European Conference on Mask Technology for Integrated Circuits and Microcomponents, (16 August 2002); doi: 10.1117/12.479341
Show Author Affiliations
Gilbert V. Shelden, International SEMATECH (United States)


Published in SPIE Proceedings Vol. 4764:
18th European Conference on Mask Technology for Integrated Circuits and Microcomponents

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