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Proceedings Paper

Fabrication of microstructures in FOTURAN using excimer and femtosecond lasers
Author(s): Joohan Kim; Halil Berberoglu; Xianfan Xu
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Paper Abstract

We discuss laser fabrication of microstructures in photoetchable glass-ceramics, FOTURAN. A KrF excimer laser (λ = 248 nm, τ = 25 ns) is used for surface micromachining, and a femtosecond laser (λ = 800 nm, τ = 80 fs) is used for fabricating three-dimensional structures. Other aspects of the machining, such as the fluence and crystallization depth resulting from these two methods are presented. A detailed analysis of the absorption process of both lasers in FOTURAN is discussed.

Paper Details

Date Published: 17 October 2003
PDF: 11 pages
Proc. SPIE 4977, Photon Processing in Microelectronics and Photonics II, (17 October 2003); doi: 10.1117/12.479239
Show Author Affiliations
Joohan Kim, Purdue Univ. (United States)
Halil Berberoglu, Purdue Univ. (United States)
Xianfan Xu, Purdue Univ. (United States)

Published in SPIE Proceedings Vol. 4977:
Photon Processing in Microelectronics and Photonics II
Alberto Piqué; Koji Sugioka; Peter R. Herman; Jim Fieret; David B. Geohegan; Frank Träger; Kouichi Murakami; Friedrich G. Bachmann; Jan J. Dubowski; Willem Hoving; Kunihiko Washio, Editor(s)

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