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Proceedings Paper

Laser processing of photonic and microelectronic components using multiple visible and UV wavelength source
Author(s): Elizabeth K. Illy; Graham Rutterford; Martyn R. H. Knowles
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Paper Abstract

Laser processing using a multiple visible and UV wavelength copper laser source is presented with particular emphasis on photonic and microelectronic applications. Visible micromachining of ceramics and diamond are discussed in addition to UV micromachining/microfabrication of germanium doped silica, sapphire and kapton.

Paper Details

Date Published: 17 October 2003
PDF: 9 pages
Proc. SPIE 4977, Photon Processing in Microelectronics and Photonics II, (17 October 2003); doi: 10.1117/12.479238
Show Author Affiliations
Elizabeth K. Illy, Oxford Lasers Ltd. (United Kingdom)
Graham Rutterford, Oxford Lasers Ltd. (United Kingdom)
Martyn R. H. Knowles, Oxford Lasers Ltd. (United Kingdom)


Published in SPIE Proceedings Vol. 4977:
Photon Processing in Microelectronics and Photonics II
Alberto Piqué; Koji Sugioka; Peter R. Herman; Jim Fieret; David B. Geohegan; Frank Träger; Kouichi Murakami; Friedrich G. Bachmann; Jan J. Dubowski; Willem Hoving; Kunihiko Washio, Editor(s)

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