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Proceedings Paper

High-quality laser microdrilling of metals and ceramics with maximum aspect ratio
Author(s): Alexander Binder; Thomas Metzger; Holger Kern; David Ashkenasi; Gerhard J. Mueller; Thomas Riesbeck; Hans Joachim Eichler
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Paper Abstract

To meet the industry's demand for reducing machine cycle lengths concerning laser-drilling a Nd:YAG Master-Oscillator Power-Amplifier (MOPA)-system was developed at the LMTB-laboratories that emits high-power peak-pulses at excellent beam-quality. Presently, the output power of the oscillator (10W@1064nm) with a beam-quality of M2=1.3 is amplified to 95W@1064nm with M2=2.3 and a single pulse energy up to 500mJ. The pulse duration can be varied between 26 and 230ns. On account of the excellent beam quality, frequency conversion resulted in 49W@532nm and 4.8@266nm. The MOPA-System is used for laser micro drilling experiments into metals and ceramics where the influence of the beam quality on the geometrical shape of the hole is investigated and compared with applications conducted with similar laser systems. Additionally means in optimizing the drilling process such as burr-minimizing and melt-reduction were introduced. Furthermore, experiments using tapered drilling technique are undertaken. A maximum aspect ratio of 1:200 in stainless steel was obtained.

Paper Details

Date Published: 17 October 2003
PDF: 11 pages
Proc. SPIE 4977, Photon Processing in Microelectronics and Photonics II, (17 October 2003); doi: 10.1117/12.479235
Show Author Affiliations
Alexander Binder, Laser- und Medizin-Technologie GmbH (Germany)
Thomas Metzger, Laser- und Medizin-Technologie GmbH (Germany)
Holger Kern, Laser- und Medizin-Technologie GmbH (Germany)
David Ashkenasi, Laser- und Medizin-Technologie GmbH (Germany)
Gerhard J. Mueller, Laser- und Medizin-Technologie GmbH (Germany)
Thomas Riesbeck, Technische Univ. Berlin (Germany)
Hans Joachim Eichler, Technische Univ. Berlin (Germany)

Published in SPIE Proceedings Vol. 4977:
Photon Processing in Microelectronics and Photonics II
Alberto Piqué; Koji Sugioka; Peter R. Herman; Jim Fieret; David B. Geohegan; Frank Träger; Kouichi Murakami; Friedrich G. Bachmann; Jan J. Dubowski; Willem Hoving; Kunihiko Washio, Editor(s)

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