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Proceedings Paper

Room temperature YBaCuO infrared detectors on a flexible substrate
Author(s): Zeynep Celik-Butler; Donald P. Butler; Ali Yildiz
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Paper Abstract

Infrared microbolometer thermal detectors have been fabricated on a flexible substrate, a polyimide that shows very similar characteristics to Kapton , when cured. The polyimide is spin-coated on a regular Si wafer with a release layer. Low temperature fabrication techniques are employed to minimize the thermal cycling of the polyimide substrate as well as to maintain compatibility with CMOS circuitry. Infrared microsensors on flexible substrates showed a Temperature Coefficient of Resistance (TCR=(1/R)(dR/dT)) of -3.03%, at room temperature. The microbolometers reached the responsivity and detectivity of 3.5x103 V/W and 1x107 cm.Hz1/2 /W, respectively, at 2.88 μA of current bias even though at this time no micromachining has been performed. Some devices were encapsulated between polyimide layers in order to provide protection and passivation. These bolometers demonstrated a responsivity and detectivity of 1.6x103 V/W and 4.9x106 cm.Hz1/2/W, respectively at 1 μA of current bias. This is the first attempt towards a smart skin that incorporates flexible microsensors on a cured polyimide-substrate.

Paper Details

Date Published: 5 August 2002
PDF: 9 pages
Proc. SPIE 4721, Infrared Detectors and Focal Plane Arrays VII, (5 August 2002); doi: 10.1117/12.478856
Show Author Affiliations
Zeynep Celik-Butler, Southern Methodist Univ. (United States)
Donald P. Butler, Southern Methodist Univ. (United States)
Ali Yildiz, Southern Methodist Univ. (United States)

Published in SPIE Proceedings Vol. 4721:
Infrared Detectors and Focal Plane Arrays VII
Eustace L. Dereniak; Robert E. Sampson, Editor(s)

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