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Proceedings Paper

Laser-irradiation-induced diffusion in metallic multilayers
Author(s): Stefan Luby; Eva Majkova; Matej Jergel; Emilia D'Anna; Armando Luches; Maurizio Martino; Paolo Mengucci; Guiseppe Majni
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Paper Abstract

Thermal stability and intermixing studies are of primary importance for diverse applications of layered structures and multilayers (MLs). Especially if the thickness of layers is in the nm range, MLs are of great interest for diffusion studies because of small diffusion distances and high number of interfaces. In the paper the intermixing measurements with pulsed excimer laser heat processing are discussed. As a representative example the intermixing studies in Co/Ag bilayers and trilayers for giant magnetoresistance structures are reported. The e-beam evaporated samples were heated by XeCl and KrF lasers and they were analyzed by RBS and grazing incidence XRD methods. Diffusion coefficients for different interfaces are characterized by the activation energy of diffusion, being 0.4 eV for a diffusion at solid- solid and 1.5 eV at solid-liquid interfaces, respectively. The effect of back-diffusion was observed in the Co/Ag immiscible combination of elements.

Paper Details

Date Published: 9 August 2002
PDF: 8 pages
Proc. SPIE 4762, ALT'01 International Conference on Advanced Laser Technologies, (9 August 2002); doi: 10.1117/12.478667
Show Author Affiliations
Stefan Luby, Institute of Physics (Slovak Republic)
Eva Majkova, Institute of Physics (Slovak Republic)
Matej Jergel, Institute of Physics (Slovak Republic)
Emilia D'Anna, INFM and Univ. degli Studi di Lecce (Italy)
Armando Luches, INFM and Univ. degli Studi di Lecce (Italy)
Maurizio Martino, INFM and Univ. degli Studi di Lecce (Italy)
Paolo Mengucci, INFM and Univ. degli Studi di Ancona (Italy)
Guiseppe Majni, INFM and Univ. degli Studi di Ancona (Italy)

Published in SPIE Proceedings Vol. 4762:
ALT'01 International Conference on Advanced Laser Technologies

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