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Proceedings Paper

Particulates in pulsed laser deposition: formation mechanisms and possible approaches to their elimination
Author(s): Ion N. Mihailescu; Valentin S. Teodorescu; Eniko Gyorgy; Carmen Ristoscu; R. Cristescu
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Paper Abstract

Thin films deposited by pulsed laser deposition or reactive pulsed laser deposition are of interest in many key technological applications. However, the main shortcoming remains the presence on their surfaces and inside their volume of particles with various shapes and dimensions. We studied the possible formation and deposition mechanisms in different laser - target material - ambient gas configurations. Our experimental results as well as numerical simulations showed, that the origin of the particulates depends on the specific irradiation conditions, target and/or ambient gas nature and pressure. Therefore, the experimental conditions required for the decreasing of the particulates density or, if possible, for their complete elimination can be optimized for any particular case only. Nevertheless, a major conclusion of our investigations is that an important approach for the decrease of the particulates density, is to avoid the presence of liquid substance within the laser irradiation field.

Paper Details

Date Published: 9 August 2002
PDF: 11 pages
Proc. SPIE 4762, ALT'01 International Conference on Advanced Laser Technologies, (9 August 2002); doi: 10.1117/12.478666
Show Author Affiliations
Ion N. Mihailescu, National Institute for Laser, Plasma, and Radiation Physics (Romania)
Valentin S. Teodorescu, National Institute for Laser, Plasma, and Radiation Physics (Romania)
Eniko Gyorgy, National Institute for Laser, Plasma, and Radiation Physics (Romania)
Carmen Ristoscu, National Institute for Laser, Plasma, and Radiation Physics (Romania)
R. Cristescu, National Institute for Laser, Plasma, and Radiation Physics (Romania)


Published in SPIE Proceedings Vol. 4762:
ALT'01 International Conference on Advanced Laser Technologies

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