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Proceedings Paper

Thin film tin oxide chemical sensors created by laser CVD and PLD techniques
Author(s): Antonino Santoni; Jan Lancok; Michele Pensa; Filip Vyslouzil; Miroslav Jelinek; Ivano Menicucci; Vladimir Myslik
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Paper Abstract

Tin oxide thin films based chemical sensors have been developed by means of laser induced chemical vapor deposition (L-CVD) and pulsed laser deposition (PLD) methods. The chemical composition of sensors was studied by XPS. By these two methods the tin oxide films were deposited at identical chemical chips and the sensitivity to hydrogen was measured and compared. An improvement of the sensitivity by using noble metal catalysts was observed. In addition, the possibility of detection Co, CH4, SO2, NO2 and N2O gasses on the films deposited by L-CVD technique and to alcohol vapor on the films deposed by PLD was studied.

Paper Details

Date Published: 9 August 2002
PDF: 5 pages
Proc. SPIE 4762, ALT'01 International Conference on Advanced Laser Technologies, (9 August 2002); doi: 10.1117/12.478625
Show Author Affiliations
Antonino Santoni, ENEA (Italy)
Jan Lancok, Institute of Physics (Czech Republic)
Michele Pensa, PASTIS-CNRSM SCpA (Italy)
Filip Vyslouzil, Institute of Chemical Technology (Czech Republic)
Miroslav Jelinek, Institute of Physics (Czech Republic)
Ivano Menicucci, ENEA (Italy)
Vladimir Myslik, Institute of Chemical Technology (Czech Republic)


Published in SPIE Proceedings Vol. 4762:
ALT'01 International Conference on Advanced Laser Technologies

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