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Proceedings Paper

Fabrication of three-dimensional photonics devices using femtosecond laser pulses
Author(s): Matthias Will; Jonas Burghoff; Stefan Nolte; Andreas Tünnermann
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Paper Abstract

Localized structural and refractive index modifications can be generated inside transparent solids by using focused ultrashort laser pulses, which allows for example the fabrication of optical waveguides. In this paper we present the fabrication of true three-dimensional integrated optical devices. The optical properties of the produced 3D structures as well as processing details and requirements on the positioning accuracy will be discussed. The experimental results will be compared with beam propagation simulations and limitations of this technique will be evaluated.

Paper Details

Date Published: 19 June 2003
PDF: 8 pages
Proc. SPIE 4978, Commercial and Biomedical Applications of Ultrafast Lasers III, (19 June 2003); doi: 10.1117/12.478598
Show Author Affiliations
Matthias Will, Friedrich-Schiller-Univ. Jena (Germany)
Jonas Burghoff, Friedrich-Schiller-Univ. Jena (Germany)
Stefan Nolte, Friedrich-Schiller-Univ. Jena (Germany)
Andreas Tünnermann, Friedrich-Schiller-Univ. Jena (Germany)

Published in SPIE Proceedings Vol. 4978:
Commercial and Biomedical Applications of Ultrafast Lasers III
Joseph Neev; Andreas Ostendorf; Christopher B. Schaffer, Editor(s)

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