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Proceedings Paper

Ultrafast pulse train micromachining
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Paper Abstract

A new micromachining technique using user-defined trains of amplified femtosecond laser pulses is described. In this method, a 2-fold Michelson interferometer is used to split each output pulse of an amplified femtosecond laser system operating at 1 kHz into four different pulses at desired seperations ranging from 1 ps to 1 ns. These quadruple pulses are then focused on metal, semiconductor and dielectric samples and the material removal characteristics are noted. The experimental results show that there is a distinct effect of the pulse separation on the machining characteristics. It is observed that, in some cases, use of the quadruple pulses separated by 1 ns provides better material removal than the original pulses separated by 1 ms. The femtosecond laser-material interaction is also modeled for the case of metal samples using the two-temperature model. Numerical simulations that were carried out show that irradiation with quadruple pulses lead to a reduction in the predicted melting threshold fluence, which agrees with the experimental observation.

Paper Details

Date Published: 19 June 2003
PDF: 9 pages
Proc. SPIE 4978, Commercial and Biomedical Applications of Ultrafast Lasers III, (19 June 2003); doi: 10.1117/12.478585
Show Author Affiliations
Ihtesham H. Chowdhury, Purdue Univ. (United States)
Xianfan Xu, Purdue Univ. (United States)
Andrew M. Weiner, Purdue Univ. (United States)


Published in SPIE Proceedings Vol. 4978:
Commercial and Biomedical Applications of Ultrafast Lasers III
Joseph Neev; Andreas Ostendorf; Christopher B. Schaffer, Editor(s)

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