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Proceedings Paper

Laser processing of microfluidic components and bioMEMS
Author(s): Elizabeth K. Illy; Graham Rutterford; Andrew I. Bell; Martyn R. H. Knowles
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Paper Abstract

Micro-processing with lasers is an enabling technology for microfluidics and bioMEMS due to the high precision, accuracy and resolution achievable using laser sources. Visible micromachining of metals and ceramics has proved an efficient and precise way of producing spotting pins for high-throughput screening applications. UV micromachining of the polymer materials often used in metered dose inhalers (MDI) and other medical devices is efficient due to the high absorption properties of these polymers. Key to these types of devices is the accuracy and reproducibility. This paper describes the use of copper vapour lasers to produce micro-fluidic and bioMEMS type components.

Paper Details

Date Published: 17 January 2003
PDF: 8 pages
Proc. SPIE 4982, Microfluidics, BioMEMS, and Medical Microsystems, (17 January 2003); doi: 10.1117/12.478559
Show Author Affiliations
Elizabeth K. Illy, Oxford Lasers Ltd. (United Kingdom)
Graham Rutterford, Oxford Lasers Ltd. (United Kingdom)
Andrew I. Bell, Oxford Lasers Ltd. (United Kingdom)
Martyn R. H. Knowles, Oxford Lasers Ltd. (United Kingdom)


Published in SPIE Proceedings Vol. 4982:
Microfluidics, BioMEMS, and Medical Microsystems
Holger Becker; Peter Woias, Editor(s)

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