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Proceedings Paper

Laser scan microscope and infrared laser scan microcope: two important tools for device testing
Author(s): Eberhard Ziegler
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Paper Abstract

The optical beam induced current (OBIC) produced in devices by a laser scan microscope (LSM) is used to localize hot spots, leakage currents, electrostatic discharge defects and weak points. The LSM also allows photoluminescence measurements with high spatial and energy resolution. Using the infrared laser scan microscope (IR LSM), defects in the metallization and latch-up sensitive region could be detected from the back of the device.

Paper Details

Date Published: 1 March 1991
PDF: 8 pages
Proc. SPIE 1400, Optical Fabrication and Testing, (1 March 1991); doi: 10.1117/12.47843
Show Author Affiliations
Eberhard Ziegler, ICT GmbH (Germany)


Published in SPIE Proceedings Vol. 1400:
Optical Fabrication and Testing

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