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Proceedings Paper

Theory and experiment as tools for assessing surface finish in the UV-visible wavelength region
Author(s): Joakim P. Ingers; Laurent Thibaudeau
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Paper Abstract

The agreement between theoretical and experimental data forlight scattering from random rough surfaces has been investigated for several different wavelengths ofthe incident field. Theoretically the scattering from twodimensional surface roughness has a dependence whereas scattering from unidirectional surface roughness has a ? dependence. We have investigated this wavelength dependence experimentally. Our results show that perturbation theory gives a good agreement with experimental data when the root-mean-square (rms) roughness of the surface does not exceed about one twentieth of the wavelength of the incident field. These results have been obtained for scattering from several different materials and wavelengths indicating that theoretical calculations can be used as tool for assessing the influence of light scattering from surface roughness on system performance. The use ofexperimental surface profile data allows us to predict the scattering from a surface with good accuracy without any prior assumptions about the surface roughness. We have not bee able to verify experimentally the theoretical wavelength dependence of the scattered intensity

Paper Details

Date Published: 1 March 1991
PDF: 8 pages
Proc. SPIE 1400, Optical Fabrication and Testing, (1 March 1991); doi: 10.1117/12.47839
Show Author Affiliations
Joakim P. Ingers, Royal Institute of Technology (Sweden)
Laurent Thibaudeau, Royal Institute of Technology (Sweden)


Published in SPIE Proceedings Vol. 1400:
Optical Fabrication and Testing
Manfred Lorenzen; Duncan R. J. Campbell; Craig Johnson, Editor(s)

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