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Proceedings Paper

Performance and applications of a spectrometer with micromachined scanning grating
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Paper Abstract

Micro Optical Electro Mechanical Systems (MOEMS) gain more and more importance in technical applications. The combination of optical actuators and micromachined silicon technology arise possibilities to realize equipment in high volumes for reasonable prices, that have formerly been expensive laboratory equipment. This paper reports on the performance and applications of a spectrometer in MOEMS technology. It is based on a scanning mirror chip with a grating structure on top. Thus a spectrometer with selectable wavelength range was realized. The resolution is not limited by line width of a multisensor detector, as it is the case for state of the art low cost spectrometers. A single detector is used, cheaper than arrays and available for all wavelength ranges. The setup can be small and light, the grating withstands shocks and vibration much better than a classical spectrometer. The grating moves with a frequency of 500 Hz respectively 1000 Hz, a whole spectrum is acquired within milliseconds. The resolution is given by the grating line density and the spectrometer dimensions, as it is valid for every single detector spectrometer. Depending on the number of systems built, a price of the system can be expected significantly below those of low cost systems with fixed grating. Many possibilities arise in every application where light is analyzed spectroscopically.

Paper Details

Date Published: 19 June 2003
PDF: 8 pages
Proc. SPIE 4987, Integrated Optics: Devices, Materials, and Technologies VII, (19 June 2003); doi: 10.1117/12.478317
Show Author Affiliations
Heinrich Gruger, Fraunhofer-Institut für Mikroelektronische Schaltungen und Systeme (Germany)
Alexander Wolter, Fraunhofer-Institut für Mikroelektronische Schaltungen und Systeme (Germany)
Tobias Schuster, Fraunhofer-Institut für Mikroelektronische Schaltungen und Systeme (Germany)
Harald Schenk, Fraunhofer-Institut für Mikroelektronische Schaltungen und Systeme (Germany)
Hubert K. Lakner, Fraunhofer-Institut für Mikroelektronische Schaltungen und Systeme (Germany)


Published in SPIE Proceedings Vol. 4987:
Integrated Optics: Devices, Materials, and Technologies VII
Yakov S. Sidorin; Ari Tervonen, Editor(s)

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